Capacitively coupled micromirror

ABSTRACT

A capacitively coupled microelectromechanical device and method of operation. The micromechanical device comprises: a semiconductor substrate; a member operable to deflect about a torsion axis to either of at least two states; and a switch driven for selectively connecting the member to a voltage signal. When a logic high signal is stored on the memory capacitor  308 , the mirror transistor  310  is turned on, grounding the mirror structure  312 . When a logic low signal is stored on the memory capacitor  308 , the mirror transistor  310  is turned off, allowing the mirror to float electrically. Mirrors that are tied to a voltage potential, which typically are grounded, are affected by a reset pulse and rotate away from their landed position. When the mirrors have rotated to the opposite side, a bias signal is applied to hold the repositioned mirror in place in the opposite state. Mirrors that electrically are floating do not experience the forces generated by the reset voltage and remain in their previous state. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

This application is a Divisional of application Ser. No. 10/027,873,filed Dec. 21, 2001, issued Jun. 14, 2005 as U.S. Pat. No. 6,906,850,which claims priority under 35 U.S.C. § 119(e)(1) of ProvisionalApplication No. 60/258,609, filed Dec. 28, 2000.

CROSS-REFERENCE TO RELATED APPLICATIONS

The following patents and/or commonly assigned patent applications arehereby incorporated herein by reference:

Patent No. Filing Date Issue Date Title 5,061,049 Sept. 13, 1990 Oct.29, 1991 Spatial Light Modulator and Method 5,583,688 Dec. 21, 1993 Dec.10, 1996 Multi-Level Digital Micromirror Device 6,147,790 May 13, 1999Nov. 14, 2000 Spring Ring Micromechanical Device

1. Field of the Invention

This invention relates to the field of microelectromechanical systems,more particularly to micromirror arrays.

2. Background of the Invention

Micromechanical devices are small structures typically fabricated on asemiconductor wafer using techniques such as optical lithography,doping, metal sputtering, oxide deposition, and plasma etching whichhave been developed for the fabrication of integrated circuits.

Micromirror devices are a type of micromechanical device. Other types ofmicromechanical devices include accelerometers, pressure and flowsensors, gears and motors. While some micromechanical devices, such aspressure sensors, flow sensors, and micromirrors have found commercialsuccess, other types have not yet been commercially viable.

Digital micromirror devices are primarily used in optical displaysystems. In display systems, the micromirror is a light modulator thatuses digital image data to modulate a beam of light by selectivelyreflecting portions of the beam of light to a display screen. Whileanalog modes of operation are possible, micromirrors typically operatein a digital bistable mode of operation and as such are the core of thefirst true digital full-color image projection systems.

Micromirrors have evolved rapidly over the past ten to fifteen years.Early devices used a deformable reflective membrane which, whenelectrostatically attracted to an underlying address electrode, dimpledtoward the address electrode. Schlieren optics illuminate the membraneand create an image from the light scattered by the dimpled portions ofthe membrane. Schlieren systems enabled the membrane devices to formimages, but the images formed were very dim and had low contrast ratios,making them unsuitable for most image display applications.

Later micromirror devices used flaps or diving board-shaped cantileverbeams of silicon or aluminum, coupled with dark-field optics to createimages having improved contrast ratios. Flap and cantilever beam devicestypically used a single metal layer to form the top reflective layer ofthe device. This single metal layer tended to deform over a largeregion, however, which scattered light impinging on the deformedportion. Torsion beam devices use a thin metal layer to form a torsionbeam, which is referred to as a hinge, and a thicker metal layer to forma rigid member, or beam, typically having a mirror-like surface:concentrating the deformation on a relatively small portion of themicromirror surface. The rigid mirror remains flat while the hingesdeform, minimizing the amount of light scattered by the device andimproving the contrast ratio of the device.

Recent micromirror configurations, called hidden-hinge designs, furtherimprove the image contrast ratio by fabricating the mirror on a pedestalabove the torsion beams. The elevated mirror covers the torsion beams,torsion beam supports, and a rigid yoke connecting the torsion beams andmirror support, further improving the contrast ratio of images producedby the device. Additional contrast improvements have been provided byvarious coatings applied to the substrate of other areas underneath themirrors.

Yet another recent micromirror configuration, called a spring-ringdesign, provide an intermediate resilient member to land the micromirroron. The resilient member is deformed when the mirror lands and storesthis potential energy until the electrostatic force deflecting themirror is removed. When the mirror is released, the resilient membersprings the mirror back toward its neutral position.

All previous torsion beam micromirror designs have used a memory cell tocreate an electric field between the mirror and an address electrode oneach side of the torsion hinge. The voltage differential between themirror and one of the address electrodes is greater than between themirror and the other address electrode—causing a greater electrostaticattraction to occur on the side having the greatest voltagedifferential. This unbalanced attractive force deflects the mirror tothe side having the greatest attractive force.

Using the memory cell to generate a voltage has an undesired side effecton the design of the micromirror circuitry. The difference between thetwo address electrodes must fairly substantial to enable reliablecontrol of the mirror position. Advances in CMOS semiconductorprocesses, however, are intended to reduce the feature size of thecircuitry and reduce the power consumption of the circuitry. Both ofthese advances tend to result in lower voltage operation of the CMOScircuitry. Thus, it is becoming increasingly difficult to use standardmodem CMOS processes to fabricate a memory cell that will reliably drivethe address voltages of a micromirror device at a level sufficient tocontrol the mirror position.

What is needed is a method and system for positioning the micromirrorthat provides reliable mirror positioning along with an excellentlifetime reliability, yet is able to be manufactured using both thefabrication processes in use today as well as advanced fabricationtechniques likely to be developed in the immediate future.

SUMMARY OF THE INVENTION

Objects and advantages will be obvious, and will in part appearhereinafter and will be accomplished by the present invention whichprovides a method and system for a capacitively controlled micromirrorand system. One embodiment of the disclosed invention provides amicromechanical device. The micromechanical device comprises: asemiconductor substrate; a member operable to deflect about a torsionaxis to either of at least two states; and a switch driven forselectively connecting the member to a voltage signal.

According to another embodiment of the disclosed invention provides amethod of operating a micromechanical device, the method comprising:selectively grounding a deflectable member; and applying a reset signalto bias electrodes to reposition the selectively grounded deflectablemember.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 is an exploded perspective view of a single spring-tipmicromirror element showing the various structures of the micromirrorand the underlying circuitry according to one embodiment of the presentinvention.

FIG. 2 is an exploded perspective view of a single spring-ringmicromirror element showing the various structures of the micromirrorand the underlying circuitry according to one embodiment of the presentinvention.

FIG. 3 is a schematic representation of one element of a micromirrorarray illustrating the circuitry driving a micromirror.

FIG. 4 is a plot of a reset waveform used to reposition deflectablemicromechanical members of FIGS. 1 and 2.

FIG. 5 is a plot of the voltage induced on the mirror during the resetpulse of FIG. 4.

FIG. 6 is a schematic representation of a 4×4 array of micromechanicalelements and their associated underlying memory arrays showing theoperation of the deflectable members.

FIG. 7 is a schematic view of a micromirror-based projection systemutilizing an improved micromirror device according to one embodiment ofthe present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

A new micromirror design and method of operation has been developed. Themethod operates a bistable deflectable member as a state machine. Thedata written to each element of the micromirror array does not determinewhich of the two bistable positions the mirror is to achieve, butinstead whether the mirror will change states or not. The method andsystem are applicable to any micromechanical devices that use capacitivecoupling to influence mechanical coupling for the purpose of statetransition.

FIG. 1 is an exploded view of a single micromirror element of thepresent invention detailing the relationships between the micromirrorstructures. The micromirror is fabricated on a semiconductor, typicallysilicon, substrate 104. Electrical control circuitry is typicallyfabricated in or on the surface of the semiconductor substrate 104 usingstandard integrated circuit process flows. This circuitry typicallyincludes, but is not limited to, a memory cell associated with, andtypically underlying, each mirror 102 and digital logic circuits tocontrol the transfer of the digital image data to the underlying memorycells. Voltage driver circuits to drive bias and reset signals to themirror superstructure may also be fabricated on the micromirrorsubstrate, or may be external to the micromirror. Image processing andformatting logic is also formed in the substrate 104 of some designs.For the purposes of this disclosure, addressing circuitry is consideredto include any circuitry, including direct voltage connections andshared memory cells, used to control the direction of rotation of amicromirror.

Some micromirror configurations use a split reset configuration whichallows several micromirror elements to share one memory cell—thusreducing the number of memory cells necessary to operate a very largearray, and making more room available for voltage driver and imageprocessing circuitry on the micromirror integrated circuit. Split resetis enabled by the bistable operation of a micromirror, which allows thecontents of the underlying memory to change without affecting theposition of the mirror 102 when the mirror has a bias voltage applied.

The silicon substrate 104 and any necessary metal interconnection layersare isolated from the micromirror superstructure by an insulating layer106 which is typically a deposited silicon dioxide layer on which themicromirror superstructure is formed. Holes, or vias, are opened in theoxide layer to allow electrical connection of the micromirrorsuperstructure with the electronic circuitry formed in the substrate104.

The first layer of the superstructure is a metalization layer, typicallythe third metalization layer and therefore often called M3. The firsttwo metalization layers are typically required to interconnect thecircuitry fabricated on the substrate. The third metalization layer isdeposited on the insulating layer 106 and patterned to form biaselectrodes 110 and mirror support pads 112. Micromirrors typically havesome sort of limiting mechanism to limit the rotation of the mirror 102and prevent the rotated mirror 102 or hinge yoke 114 from touching thebias electrodes 110, which have a voltage potential relative to themirror 102. If the mirror 102 contacts the bias electrodes 110, theresulting short circuit could fuse the torsion hinges 116 or weld themirror 102 to the bias electrodes 110, in either case ruining themicromirror.

The micromirror shown in FIG. 1 is a spring-tip design. Resilientspring-tip 128 extensions of the hinge yoke 114 contacts areas of themirror support pads 112 and additional landing sites 130 to stop therotation of the hinge yoke 114 and mirror 102.

The micromirror shown in FIG. 2 is a spring-ring design. A resilientring member 132 extends around the device under the perimeter of themirror. When the mirror 102 is deflected, the ring 132 contacts theunderneath side of the mirror 102 and stops the rotation of the mirror.These landing sites, whether part of the mirror support pads 112 orseparate landing sites 130, are often coated with a material chosen toreduce the tendency of the mirror 102 and torsion hinge yoke 114 tostick to the landing site.

A first layer of supports, typically called spacervias, is fabricated onthe metal layer forming the bias electrodes 110 and mirror biasconnections 112. These spacervias, which include both hinge supportspacervias 116 and upper bias electrode spacervias 118, are typicallyformed by spinning a thin spacer layer over the bias electrodes 110 andmirror bias connections 112. This thin spacer layer is typically a 1 μmthick layer of positive photoresist. After the photoresist layer isdeposited, it is exposed, patterned, and deep UV hardened to form holesin which the spacervias will be formed. This spacer layer and a thickerspacer layer used later in the fabrication process are often calledsacrificial layers since they are used only as forms during thefabrication process and are removed from the device prior to deviceoperation.

A thin layer of metal is sputtered onto the spacer layer and into theholes. An oxide is then deposited over the thin metal layer andpatterned to form an etch mask over the regions that later will formhinges 120. A thicker layer of metal, typically an aluminum alloy, issputtered over the thin layer and oxide etch masks. Another layer ofoxide is deposited and patterned to define the hinge yoke 114, hinge cap122, and the upper bias electrodes 124. After this second oxide layer ispatterned, the two metals layers are etched simultaneously and the oxideetch stops removed to leave thick rigid hinge yokes 114, hinge caps 122,and upper bias electrodes 124, and thin flexible torsion beams 120.

A thick spacer layer is then deposited over the thick metal layer andpatterned to define holes in which mirror support spacervias 126 will beformed. The thick spacer layer is typically a 2 μm thick layer ofpositive photoresist. A layer of mirror metal, typically an aluminumalloy, is sputtered on the surface of the thick spacer layer and intothe holes in the thick spacer layer. This metal layer is then patternedto form the mirrors 102 and both spacer layers are removed using aplasma etch.

Once the two spacer layers have been removed, the mirror is free torotate about the axis formed by the torsion hinge. Electrostaticattraction between a bias electrode 110 and a deflectable rigid member,which in effect form the two plates of an air gap capacitor, is used torotate the mirror. Depending on the design of the micromirror device,the deflectable rigid member typically is the torsion beam yoke 114 andthe beam or mirror 102 or a beam attached directly to the torsionhinges. For simplicity, when the following description describeselectrostatic forces on and movements of the deflectable rigid member,there term mirror will be used. The upper bias electrodes 124 alsoelectrostatically attract the deflectable rigid member.

Prior art micromirrors created an unbalanced electrostatic field betweenan address electrode on either side of the torsion hinge axis and themirror. This caused the mirror to rotate toward the side having thegreatest potential difference. For example, a logic highsignal—typically 5 volts—is applied to one address electrode, a logiclow signal—typically 0 volts—is applied to the other address electrode,and a relatively large negative voltage is applied to the mirror tocause the mirror to rotate toward the positively biased addresselectrode.

The present invention breaks this tradition by not using an addresselectrode voltage to determine which address electrode will rotate to.Instead, the present invention either floats the mirror or ties themirror to a voltage potential. Mirrors that are tied to a voltagepotential, which typically are grounded, are affected by a reset pulseand rotate away from their landed position. When the mirrors haverotated to the opposite side, a bias signal is applied to hold therepositioned mirror in place in the opposite state. Mirrors thatelectrically are floating do not experience the forces generated by thereset voltage and remain in their previous state.

FIG. 3 is a schematic representation of one element of a micromirrorarray illustrating the circuitry driving a micromirror. In FIG. 3, datais written to the micromirror element through bit line 302. Word line304 is active when the element is written to causing the pass transistor306 to turn on and allowing the bit line driver to charge the memorycapacitor 308. When a logic high signal is stored on the memorycapacitor 308, the mirror transistor 310 is turned on grounding themirror structure 312.

When the mirror structure 312 is electrically grounded and positionednear bias electrode 314, a reset signal is applied to both of the biaselectrodes 314, 316. A typical bias signal is shown in FIG. 4. In FIG.4, the voltage level is shown on the Y axis while time is shown on the Xaxis. The bias signal 402 includes a reset pulse 404. The reset pulse404 shown in FIG. 4 is a 32 volt pulse. The reset pulse 404 greatlyincreases the electrostatic attraction between the bias electrodes andthe mirror. This causes the mirror to move toward the bias electrodes,which deforms the spring tips and may also deform the torsion hinge andhinge yoke. When the reset pulse is removed, the energy stored by thedeformation is released and springs the mirror away from the biaselectrode. The reset pulse duration is determined by the resonantresponse of the deflectable member and is chosen to maximize the releaseenergy.

After the reset pulse 404, the bias voltage is removed for a shortperiod 406 during which the released mirror transitions from a firstbias electrode to near a bias electrode on the opposite side of thetorsion hinge. After the mirror is repositioned near the opposite biaselectrode, the bias signal is reapplied, holding the mirror against theopposite bias electrode. Typically a 24 volt bias signal is used to holdthe mirror in position.

The forces created during the reset process are proportional to thesquare of the voltage differential between the bias electrode and themirror. Since the mirror is grounded, the reset energy is proportionalto the square of the reset voltage pulse.

Returning to FIG. 3, when it is desirable to keep a mirror in itscurrent position, a logic low signal is applied to the bit line 302 whenthe word line 304 is active, writing a logic low onto the capacitor 308.The logic low signal does not turn on the mirror transistor 310resulting in the mirror 312 being electrically isolated from theremainder of the circuit. FIG. 5 is a plot of the voltage induced on themirror during the reset pulse 404 described above.

As described above, the force created by the pulse 404 is proportionalto the square of the voltage differential between the bias electrode andthe mirror. Since the mirror floats, the reset pulse may generate muchless energy in a floating mirror compared to a grounded mirror. Withless energy, the floating mirrors do not transition away from the nearbybias electrode until after the bias voltage is reapplied. Thus, floatingmirrors are re-captured by the bias electrode while the grounded mirrorstransition to the other state and are captured by the opposite biaselectrode.

Since the data written to the memory only determines whether the mirrorwill change states, some mechanism is necessary to initially positionthe mirror in a known state. Putting the mirror in a know state isachieved by applying a bias voltage to only one of the two biaselectrodes. This initialization function is the reason the two biaselectrodes are electrically isolated from each other. An alternative isto use a separate initialization electrode, although an initializationelectrode takes valuable area away from the bias electrodes.

FIG. 6 is a schematic representation of a 4×4 portion of a mirror arrayand the associated portion of the underlying memory array showing theoperation of the micromirror. In FIG. 6 each mirror in the mirror arrayinitially is set to a first “off” position by the application of a biasvoltage to only one of the bias electrodes (V₁=ON). This creates anunbalanced electrostatic attraction that forces the mirrors to the offposition, shown as “O” in mirror array 602, regardless of the contentsof the memory, shown as a don't care “X” in memory array 604.

To change the position of some of the mirrors, a logic “1” is writteninto the corresponding memory cell. The memory array 606, shown in FIG.6, forces alternate mirrors to change state during a reset operation asshown in mirror array 608. Likewise writing memory array patterns 610and 612 prior to the following reset operations results in the mirrorpositions shown in FIGS. 614 and 616. In the final representation of themirror array 618, all of the mirrors are forced to the on position,regardless of the contents of the memory array 620 by the application ofa bias voltage to only one of the bias electrodes (V₂=ON).

The new micromirror design and method of operation may provide severaladvantages. Since the memory voltage is not used to determine theposition of a mirror, this design may enable the use of low voltage CMOSprocesses. Additionally, this design is less likely to suffer frommirror upset when the memory data is changed while the mirror is landed.The resistance of the device to photo-generated upset is increased sincethe photo-generated carriers do not alter the address voltages and areunlikely to be strong enough to change the state of the memorytransistor. Because a single polarity reset voltage is used, the ESDprotection may be added to protect the circuitry.

The new design typically reduces scrubbing of the landing sites byaround 50% compared to prior architectures. Pixels that do nottransition states remain on the landing sites and therefore do not scrubthe landing site when they would otherwise release and re-land. Becausethe design relies on the reset velocity of the mirrors—and not hingecompliance—to transition the mirrors, sensitivity to hinge memory isgreatly reduced, leading to improved reliability and higher devicemanufacturing yield. Because the mirrors are held at a low voltage,typically ground, there is no cross-talk between the mirrors.

The micromirror device described above is typically used to createprojected images. Intermediate brightness levels are created by pulsewidth modulation techniques in which the mirror is rapidly andrepetitively rotated on and off. The duty cycle of the mirror determinesthe quantity of light reaching the image plane. The human eye integratesthe light pulses and the brain perceives a flicker-free intermediatebrightness level.

Full-color images are generated by using three micromirror devices toproduce three single-color images, or by sequentially forming threesingle-color images using a single micromirror device illuminated by abeam of light passing through three color filters mounted on a rotatingcolor wheel.

FIG. 7 is a schematic view of an image projection system 700 using animproved micromirror 702 according to the present invention. In FIG. 7,light from light source 704 is focused on the improved micromirror 702by lens 706. Although shown as a single lens, lens 706 is typically agroup of lenses and mirrors which together focus and direct light fromthe light source 704 onto the surface of the micromirror device 702. Thelight source is positioned at an angle approximately equal to twice theangle of rotation so that mirrors rotated toward the light sourcereflect light in a direction normal to the surface of the micromirrordevice and into the aperture of a projection lens 710 (also shown as asingle lens for simplicity). Mirrors rotated away from the light sourcereflect light away from the projection lens and to light trap 708. Imagedata and control signals from controller 714 determine the position ofthe mirrors. Projection lens 710 focuses the light modulated by themicromirror device 702 onto an image plane or screen 712. Pixelscorresponding to the mirrors rotated toward the light source receivelight, while the pixels corresponding to the mirrors rotated away fromthe light source remain dark.

Thus, although there has been disclosed to this point a particularembodiment for a capacitively coupled micromirror device and methodtherefore, it is not intended that such specific references beconsidered as limitations upon the scope of this invention exceptinsofar as set forth in the following claims. Furthermore, havingdescribed the invention in connection with certain specific embodimentsthereof, it is to be understood that further modifications may nowsuggest themselves to those skilled in the art, it is intended to coverall such modifications as fall within the scope of the appended claims.In the following claims, only elements denoted by the words “means for”are intended to be interpreted as means plus function claims under 35U.S.C. § 112, paragraph six.

1. A method of operating a micromechanical device comprising: providinga micromechanical device comprising at least one element comprising amember deflectable to a first state and a second state; operating saiddevice to place said at least one member in a state; providing a signalto said element, said signal having a first condition to indicate saidmember should stay in its current state, and a second condition toindicate said member should transition from its current state; providinga reset signal to said element such that said element provided saidfirst condition stays in said current state, and said element providedsaid second condition transitions from said current state.
 2. The methodof claim 1, said providing a micromechanical device comprising providinga micromirror device.
 3. The method of claim 1, said providing amicromechanical device comprising providing a micromirror array.
 4. Themethod of claim 1, said providing a micromechanical device comprisingproviding an array of said elements, each said element comprising a passtransistor, a capacitor, and a deflectable member.
 5. The method ofclaim 1, said operating step comprising driving an electrode to deflectsaid member.
 6. The method of claim 1, said step of providing a resetsignal comprising driving at least one electrode of said element.
 7. Themethod of claim 1, said step of providing a reset signal comprisingdriving at least two electrodes of said element.
 8. The method of claim1, said step of providing a reset signal comprising driving at least oneelectrode on each side of an axis about which said member deflects.
 9. Amethod of operating a micromechanical device comprising: providing amicromechanical device comprising at least one element comprising amember deflectable to a first state and a second state; operating saiddevice to place said at least one member in a state; providing a signalto said element, said signal having a first condition to indicate saidmember should stay in its current state regardless of said currentstate, and a second condition to indicate said member should transitionfrom its current state regardless of said current state; providing areset signal to said element such that said element provided said firstcondition stays in said current state, and said element provided saidsecond condition transitions from said current state.
 10. The method ofclaim 9, said providing a micromechanical device comprising providing amicromirror device.
 11. The method of claim 9, said providing amicromechanical device comprising providing an array of said elements,each said element comprising a pass transistor, a capacitor, and adeflectable member.
 12. The method of claim 9, said operating stepcomprising driving an electrode to deflect said member.
 13. The methodof claim 9, said step of providing a reset signal comprising driving atleast one electrode of said element.
 14. The method of claim 9, saidstep of providing a reset signal comprising driving at least oneelectrode on each side of an axis about which said member deflects. 15.A method of operating a micromechanical device comprising: providing amicromechanical device comprising at least one element comprising amember deflectable to a first state and a second state; operating saiddevice to place said at least one member in a state; loading a memorycell associated with said micromechamcal element with a signal having afirst condition to indicate said member should stay in its currentstate, and a second condition to indicate said member should transitionfrom its current state; providing a reset signal to said element suchthat said element provided said first condition stays in said currentstate, and said element provided said second condition transitions fromsaid current state.
 16. The method of claim 15, said providing amicromechanical device comprising providing a micromirror device. 17.The method of claim 15, said providing a micromechanical devicecomprising providing an array of said elements, each said elementcomprising a pass transistor, a capacitor, and a deflectable member. 18.The method of claim 15, said operating step comprising driving anelectrode to deflect said member.
 19. The method of claim 15, said stepof providing a reset signal comprising driving at least one electrode ofsaid element.
 20. The method of claim 15, said step of providing a resetsignal comprising driving at least one electrode on each side of an axisabout which said member deflects.